summary
Terminology Relating to Measurements Taken on Thin, Reflecting Films
description
Scope
1.1 This standard consists of terms and definitions pertaining to measurements taken on thin, reflecting films, such as found in microelectromechanical systems (MEMS) materials. In particular, the terms are related to the standards in Section 2, which were generated by Committee E08 on Fatigue and Fracture. Terminology E1823 Relating to Fatigue and Fracture Testing is applicable to this standard.
Details
Publisher
ASTM
File size
45.46 KB
Pages
2
Format
PDF
Publication date
2018-05-28