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Standard Terminology Relating to Surface Analysis
description
Scope
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
Details
Publisher
ASTM
File size
90.46 KB
Pages
10
Format
PDF
Publication date
2021-03-02
