summary
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
description
Scope
1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.
1.2 The values stated in SI units are regarded as standard.
Details
Publisher
ASTM
File size
20.03 KB
Pages
2
Format
PDF
Publication date
2017-08-16
