summary
Standard Specification for Chromium Sputtering Targets for Thin Film Applications
description
Scope
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are regarded as standard.
Details
Publisher
ASTM
File size
17 KB
Pages
2
Format
PDF
Publication date
2021-03-02
