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summary
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches. (Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter.)
Details
Publisher
DIN
File size
1.21 MB
Pages
37
Format
PDF
Publication date
2012-03-01