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summary
Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry. (Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektroskopischer Ellipsometrie.)
Details
Publisher
DIN
File size
215.73 KB
Pages
14
Format
PDF
Publication date
2023-01-01