loading preview...
summary
Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry. (Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektrokopischer Ellipsometrie.)
Details
Publisher
DIN
File size
476.95 KB
Pages
25
Format
PDF
Publication date
2022-08-01