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summary
62659-2015 - IEC/IEEE International Standard - Nanomanufacturing -- Large scale manufacturing for nanoelectronics
description
Standard number: 62659-2015. Status: Active. DOI: 10.1109/IEEESTD.2015.7407265
Details
Publisher
IEEE
File size
304.32 KB
Pages
16
Format
PDF
Publication date
2015-12-01
ISBN-13
978-2-832-22915-6
ISBN-13 plain
9782832229156
ISBN-10
2832229156