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Semiconductor devices. Micro-electromechanical devices. Terms and definitions | Status: Revised, Superseded, Withdrawn
Details
Publisher
BS
File size
1.43 MB
Pages
28
Format
PDF
Publication date
2006-09-29
ISBN-13
978-0-580-49123-8
ISBN-13 plain
9780580491238
ISBN-10
0580491234