What is BS EN 62047-14 - Forming limit of metallic film materials used in micro electromechanical devices about?
BS EN 62047-14 is the 14th part of multi-series standard used for Semiconductor devices that specifies the measuring method for forming limit of metallic film materials used in micro-electromechanical devices. BS EN 62047-14 is useful in manufacturing good quality metallic film materials used in these devices.
BS EN 62047-14 describes definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 μm to 300 μm. The metallic film materials described herein are typically used in electric components, MEMS and microdevices.
When metallic film materials used in MEMS (see 2.1.2 of IEC 62047-1:2005) are fabricated by a forming process such as imprinting, it is necessary to predict the material failure in order to increase the reliability of the components. Through this prediction, the effectiveness of manufacturing MEMS components by a forming process can also be improved, because the period of developing a product can be reduced and manufacturing costs can thus be decreased. BS EN 62047-14 presents one of the prediction methods for material failure in the imprinting processes.
Who is BS EN 62047-14 - Forming limit of metallic film materials used in micro electromechanical devices for?
BS EN 62047-14 on Semiconductor devices are useful for:
- Manufacturers of semiconductor devices
- Manufacturers of electronic devices
- Manufacturers of automotive parts
- Electronic engineers
- Semiconductor foundries
Why should you use BS EN 62047-14 - Forming limit of metallic film materials used in micro electromechanical devices?
Micro-electromechanical systems (MEMS) are a process technology that is useful in creating tiny integrated devices or systems. These devices are useful in combining mechanical and electrical components.
BS EN 62047-14 specifies the measuring method and procedure for forming limit of metallic film materials used in micro-electromechanical systems (MEMS). This helps in determining the forming limit diagram (FLD) by pressing the microfilm material using a hemispherical punch. The testing method also helps in measuring the major and minor strains of a deformed specimen by using a digital camera module or an optical device.
By applying BS EN 62047-14, you can manufacture good quality metallic film materials used in Micro-electromechanical systems (MEMS).
