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Semiconductor devices. Micro-electromechanical devices. Strip bending test method for tensile property measurement of thin films | Status: Current
Details
Publisher
BS
File size
1.66 MB
Pages
22
Format
PDF
Publication date
2011-06-30
ISBN-13
978-0-580-60629-8
ISBN-13 plain
9780580606298
ISBN-10
0580606298