BS EN 62047-9:2011

Semiconductor devices. Micro-electromechanical devices. Wafer to wafer bonding strength measurement for MEMS | Status: Current

1 Scope This standard describes bonding strength measurement method of wafer to wafer bonding, type of bonding process such as silicon to silicon fusion bonding, silicon to glass anodic bonding, etc., and applicable structure size during MEMS processing/assembly. The applicable wafer thickness is in the range of 10 μm to several millimeters.