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summary
Geometrical product specifications (GPS). Surface texture: Areal. Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments | Status: Superseded, Withdrawn
description
1 Scope
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Details
Publisher
BS
File size
2.2 MB
Pages
40
Format
PDF
Publication date
2013-10-31
ISBN-13
978-0-580-82360-2
ISBN-13 plain
9780580823602
ISBN-10
0580823602