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Geometrical product specifications (GPS). Surface texture: Areal. Nominal characteristics of non-contact (coherence scanning interferometry) instruments | Status: Superseded, Withdrawn
description
1 Scope
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Details
Publisher
BS
File size
2.5 MB
Pages
52
Format
PDF
Publication date
2013-08-31
ISBN-13
978-0-580-66355-0
ISBN-13 plain
9780580663550
ISBN-10
0580663550