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Geometrical product specifications (GPS). Surface texture: Areal. Design and characteristics of non-contact (coherence scanning interferometry) instruments | Status: Current
description
1 Scope
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
Details
Publisher
BS
File size
1.22 MB
Pages
32
Format
PDF
Publication date
2025-02-28
ISBN-13
978-0-539-24351-2
ISBN-13 plain
9780539243512
ISBN-10
0539243512