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Geometrical product specifications (GPS). Surface texture: Areal. Nominal characteristics of non-contact (confocal microscopy) instruments | Status: Current, Project Underway
description
1 Scope
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Details
Publisher
BS
File size
2.17 MB
Pages
30
Format
PDF
Publication date
2019-04-17
ISBN-13
978-0-539-07000-2
ISBN-13 plain
9780539070002
ISBN-10
0539070002