BS IEC 62047-42:2022

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Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever | Status: Current

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Publisher BS

File size 1.37 MB

Pages 24

Format PDF

Publication date 2022-10-31

ISBN-13 978-0-539-16581-4

ISBN-13 plain 9780539165814

ISBN-10 0539165814

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File size 1.37 MB

Pages 24

Format PDF

Publication date 2022-10-31

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