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Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane | Status: Current
Details
Publisher
BS
File size
1.24 MB
Pages
18
Format
PDF
Publication date
2025-04-30
ISBN-13
978-2-832-70350-2
ISBN-13 plain
9782832703502
ISBN-10
2832703502