BS IEC 63068-4:2022

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Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence | Status: Current

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Publisher BS

File size 7.39 MB

Pages 28

Format PDF

Publication date 2022-09-07

ISBN-13 978-2-832-24307-7

ISBN-13 plain 9782832243077

ISBN-10 2832243077

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File size 7.39 MB

Pages 28

Format PDF

Publication date 2022-09-07

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