BS ISO 13083:2015

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Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes. | Status: Confirmed, Current

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Publisher BS

File size 2.03 MB

Pages 26

Format PDF

Publication date 2015-08-31

ISBN-13 978-0-580-67751-9

ISBN-13 plain 9780580677519

ISBN-10 0580677519

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File size 2.03 MB

Pages 26

Format PDF

Publication date 2015-08-31

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