BS ISO 13424:2013 - Page 2

Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis. | Status: Confirmed, Current

1 Scope This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.