BS ISO 14606:2000

Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials. | Status: Revised, Superseded, Withdrawn

1 Scope This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.