What is ISO 16413 about?
ISO 16413 is an international standard that discusses the evaluation of thickness, density and interface width of thin films by X-ray reflectometry.
ISO 16413 specifies a method for the evaluation of thickness, density and interface width layer and multi-layered thin films which have a thickness between approximately 1nm and 1 μm, on flat substrates, using X-Ray Reflectometry (XRR).
ISO 16413 uses a monochromatic, collimated beam, scanning an angle or a scattering vector.
Note 1: A convergent beam with parallel data collection using a distributed detector or scanning wavelength, are not described under ISO 16413.
Note 2: Proprietary techniques are not described under ISO 16413.
Who is ISO 16413 for?
ISO 16413 on X-ray reflectometry is useful for:
- Companies dealing with x-ray reflectometry
- Manufacturing of X-ray machine and components
- Retailers and suppliers of X-ray machines
Why should you use ISO 16413?
X-ray reflectivity is also known as X-ray reflectometry is a surface-sensitive analytical technique that is used in chemistry, physics and material science to characterize the surfaces, thin films and multiplayer.
ISO 16413 gives you a typical surface chemical analysis method that provides specifications of the amount of substance to estimate thickness. ISO 16413 on X-ray reflectometry provides thickness that is directly traceable to the unit of length.
ISO 16413 provides the requirements for equipment suitable for collecting specular X-ray reflectivity data of high quality, and the requirement for specimen alignment and positioning so that you can obtain an accurate measurement. This helps you in operating the X-ray reflectometry.
ISO 16413 assists in the efficient evaluation of thickness, density and interface width of thin films and thus can enhance the quality and efficiency of thin films by correctly evaluating the thin films.
What’s changed since the last update?
BS ISO 16413:2020 supersedes BS ISO 16413:2013, which is withdrawn. BS ISO 16413:2020 has made editorial changes, mainly for a more precise description with respect to BS ISO 16413:2013.
