BS ISO 17470:2014

Microbeam analysis. Electron probe microanalysis. Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry. | Status: Current, Project Underway

1 Scope This International Standard gives guidance for the identification of elements and the investigation of the presence of specific elements within a specific volume (on a μm3 scale) contained in a specimen, by analysing X-ray spectra obtained using wavelength dispersive X-ray spectrometers on an electron probe microanalyser or on a scanning electron microscope.