BS ISO 17974:2002

Surface chemical analysis. High-resolution Auger electron spectrometers. Calibration of energy scales for elemental and chemical-state analysis. | Status: Confirmed, Current

1 Scope This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers used for elemental and chemical state analysis at surfaces. It also specifies a calibration schedule for testing the kinetic energy scale linearity at one intermediate energy, for confirming the uncertainty of the scale calibration at one low and one high kinetic energy value, for correcting for small drifts of that scale and for defining the expanded uncertainty of the calibration of the kinetic energy scale with a confidence level of 95 % (this uncertainty includes contributions for behaviours observed in interlaboratory studies but does not cover all possible defects). It is applicable only to those instruments incorporating an ion gun for sputter cleaning. It is not applicable to instruments with kinetic energy scale errors significantly non-linear with energy. Neither it is applicable to those instruments operated at relative resolutions poorer than 0,2 % in the constant ΔE/E mode or 1,5 eV in the constant ΔE mode, those requiring tolerance limits of ± 0,05 eV or less, nor to those with an electron gun that cannot be operated in the energy range 5 keV to 10 keV. It does not provide a full calibration check for confirming the energy measured at each addressable point on the energy scale, this being performed according to the manufacturer's recommendations.