BS ISO 19606:2024

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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for surface roughness of fine ceramic films by atomic force microscopy. | Status: Current

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1 Scope

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.

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Publisher BS

File size 1.54 MB

Pages 34

Format PDF

Publication date 2024-11-30

ISBN-13 978-0-539-23826-6

ISBN-13 plain 9780539238266

ISBN-10 0539238266

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File size 1.54 MB

Pages 34

Format PDF

Publication date 2024-11-30

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