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summary
Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges. | Status: Confirmed, Current
description
What is this standard about?
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
Details
Publisher
BS
File size
835.28 KB
Pages
28
Format
PDF
Publication date
2019-03-12
ISBN-13
978-0-580-95901-1
ISBN-13 plain
9780580959011
ISBN-10
0580959011
