BS ISO 22048:2004

Surface chemical analysis. Information format for static secondary-ion mass spectrometry. | Status: Confirmed, Current

1 Scope This International Standard provides a digital format to store, and transfer between computers, in a compact way, important calibration and instrumental-parameter data necessary to make effective use of spectral-data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976.