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Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering. | Status: Current
description
1 Scope
This document specifies a method for the quantitative depth profiling of amorphous heavy metal oxide ultrathin films on Si substrates using medium energy ion scattering (MEIS).
Details
Publisher
BS
File size
2.28 MB
Pages
38
Format
PDF
Publication date
2022-08-03
ISBN-13
978-0-539-14473-4
ISBN-13 plain
9780539144734
ISBN-10
0539144734