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Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale. | Status: Confirmed, Current
description
1 Scope
This International Standard specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.
Details
Publisher
BS
File size
575.11 KB
Pages
24
Format
PDF
Publication date
2005-05-12
ISBN-13
978-0-580-45967-2
ISBN-13 plain
9780580459672
ISBN-10
0580459675