loading preview...
summary
Vacuum technology.Vacuum gauges.Specifications, calibration and measurement uncertainties for spinning rotor gauges. | Status: Superseded, Withdrawn
description
1 ​Scope
This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
Details
Publisher
BS
File size
1.19 MB
Pages
20
Format
PDF
Publication date
2022-08-20
ISBN-13
978-0-539-15429-0
ISBN-13 plain
9780539154290
ISBN-10
0539154290