BS ISO 27911:2011

Surface chemical analysis. Scanning-probe microscopy. Definition and calibration of the lateral resolution of a near-field optical microscope. | Status: Confirmed, Current

1 Scope This International Standard describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.