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Production equipment for microsystems. Interface between end effector and handling system. | Status: Confirmed, Current
description
1 Scope
This International Standard specifies provisions for the interface between end effector and handling systems in production equipment for microsystems. It specifies principal deviations, tolerances and designations for manually and automatically changeable end effectors. The aim is to specify the end effector interface in three levels with an increasing degree of specification.
Details
Publisher
BS
File size
1001.94 KB
Pages
28
Format
PDF
Publication date
2011-03-31
ISBN-13
978-0-580-65266-0
ISBN-13 plain
9780580652660
ISBN-10
0580652660