PD IEC TR 63258:2021

Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films. | Status: Current

1 Scope This document, which is a Technical Report, is focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility. This document includes

• – outlines of the ellipsometry procedures,
• – methods of interpretation of results and discussion of data analysis, and
• – case studies.