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Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods. | Status: Current
description
1 Scope
This Technical Report describes:
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a) Functions and their relevance to lateral resolution:
- 1) Point spread function (PSF) — see 4.1.1
- 2) Line spread function (LSF) — see 4.1.2
- 3) Edge spread function (ESF) — see 4.1.3
- 4) Modulation transfer function (MTF) — see 4.1.4
- 5) Contrast transfer function (CTF) — see 4.1.5.
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b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
- 1) Imaging of a narrow stripe — see 4.2
- 2) Imaging of a sharp edge — see 4.3
- 3) Imaging of square-wave gratings — see 4.4.
- c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.
Details
Publisher
BS
File size
7.82 MB
Pages
126
Format
PDF
Publication date
2013-03-31
ISBN-13
978-0-580-71186-2
ISBN-13 plain
9780580711862
ISBN-10
0580711862
