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Automation systems and integration. Digital twin framework for manufacturing. Use case on management of semiconductor ingot growth process | Status: Current
description
1 Scope
This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.
Details
Publisher
BS
File size
1.59 MB
Pages
24
Format
PDF
Publication date
2025-05-30
ISBN-13
978-0-539-34196-6
ISBN-13 plain
9780539341966
ISBN-10
0539341966