What is ISO 11952 - Scanning-probe microscopy about?
ISO 11952 is applicable for scanning-probe microscopy.
ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations.
Note-
It is not intended for general industrial use, where a lower level of calibration might be required.
Who is ISO 11952 - Scanning-probe microscopy for?
ISO 11952 on the determination of geometric quantities using SPM is useful for:
- Chemistry and biology laboratories
- Software engineer of SPM
- Manufacturers and suppliers of the SPM system
Why should you use ISO 11952 - Scanning-probe microscopy?
An SPM is a serially operating measuring device that uses a probe with a tip of adequate fineness to trace the surface of the object to be measured by exploitation of a local physical interaction (such as the quantum-mechanical tunnel effect, interatomic or intermolecular forces, or evanescent modes of the electromagnetic field).
ISO 11952 aims at axis calibrations at the highest level and is thereby intended primarily for high-stability SPMs, a lower level of calibration might be required for general industry use.
ISO 11952 specifies signals that will help you to determine the topography (hereinafter called the “z-signal”). ISO 11952 covers the verification of the device characteristics that will help you to measure geometrical measurands and the calibration of the axes of motion i.e., the traceability to the unit of length via measurement on traceable lateral, step height and 3D measurement standards
