BS ISO 29301:2010

Microbeam analysis. Analytical transmission electron microscopy. Methods for calibrating image magnification by using reference materials having periodic structures. | Status: Superseded, Withdrawn

1 Scope This International Standard specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This International Standard is applicable to the magnification of the TEMimage recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This International Standard also refers to the calibration of a scale bar. This International Standard does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).